Relaxed Si 0.7 Ge 0.3 buffer layers grown on patterned silicon substrates for SiGe n-channel HMOSFETs

Author: Wohl G.   Dudek V.   Graf M.   Kibbel H.   Herzog H.-J.   Klose M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.369, Iss.1, 2000-07, pp. : 175-181

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Abstract