Defect distribution and morphology development of SiGe layers grown on Si(100) substrates by LPE

Author: Sembian A.M.   Konuma M.   Silier I.   Gutjahr A.   Rollbuhler N.   Banhart F.   Moorthy Babu S.   Ramasamy P.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.336, Iss.1, 1998-12, pp. : 116-119

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Abstract