In situ spectroscopic ellipsometry for plasma-carburising process

Author： Moritani A.   Yamada T.   Kitamura T.   Katayama H.   Noda Y.   Kanayama N.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.374, Iss.2, 2000-10, pp. : 298-302

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