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Hardness measurements at shallow depths on ultra-thin amorphous carbon films deposited onto silicon and Al 2 O 3 -TiC substrates

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The study of electronic conduction in amorphous thin films of Al-In₂O₃-Al structure deposited by thermal evaporation

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Crystallization behavior of thin ALD-Al 2 O 3 films

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Refractive index and adhesion of Al 2 O 3 thin films obtained from different processes - A comparative study

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