Role of ion bombardment and plasma impedance on the performances presented by undoped a-Si:H films

Author: Martins R.   Aguas H.   Ferreira I.   Silva V.   Cabrita A.   Fortunato E.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.383, Iss.1, 2001-02, pp. : 165-168

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Abstract