Composition and thickness of non-functional organosilane films coated on aluminium studied by means of infra-red spectroscopic ellipsometry

Author: Franquet A.   Terryn H.   Vereecken J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.441, Iss.1, 2003-09, pp. : 76-84

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Abstract