Effect of r.f.-plasma assistance in hot-wire CVD on properties of c-Si:H

Author: Itoh T.   Inouchi H.   Ohkado K.   Chikusa K.   Nakamura N.   Kondo H.   Yoshida N.   Nonomura S.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.395, Iss.1, 2001-09, pp. : 217-220

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract