Correlation between the composition, structure and properties of dual ion beam deposited SiN x films

Author： Tsang M.P. Ong C.W. Choy C.L. Lim P.K. Hung W.W.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.424, Iss.1, 2003-01, pp. : 143-147

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