Hot-wire CVD-grown microcrystalline silicon films with and without initial growing layer modification by transformer-coupled plasma

Author： Kim D.Y.   Ahn B.J.   Moon S.I.   Yi J.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.395, Iss.1, 2001-09, pp. : 184-187

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