Hydrogen distribution, nanostructures and optical properties of high deposition rate hot-wire CVD a-Si:H

Author: Baugh J.   Wang K.   Han D.   Wu Y.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.430, Iss.1, 2003-04, pp. : 95-99

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Abstract