Influence of Si(100) surface pretreatment on the morphology of TiO 2 films grown by atomic layer deposition

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Effect of crystal structure on optical properties of TiO 2 films grown by atomic layer deposition

By Aidla A.   Uustare T.   Kiisler A.-A.   Aarik J.   Sammelselg V.  

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Spectroscopic study of nanocrystalline TiO2 thin films grown by atomic layer deposition

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Electrical characterization of thin Al 2 O 3 films grown by atomic layer deposition on silicon and various metal substrates

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Transmission electron microscopy investigation of the effect of deposition conditions and a platinum layer in gas-sensitive r.f.-sputtered SnO 2 films

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