The nanostructure evolution during and after magnetron deposition of Au films

Author: Schell N.   Jensen T.   Petersen J.H.   Andreasen K.P.   Bottiger J.   Chevallier J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.441, Iss.1, 2003-09, pp. : 96-103

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Abstract