The amorphous range in sputtered Si-Al-Sn films

Author： Hatchard T.D.   Dahn J.R.   Trussler S.   Fleischauer M.   Bonakdarpour A.   Mueller-Neuhaus J.R.   Hewitt K.C.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.443, Iss.1, 2003-10, pp. : 144-150

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