Behavior of hydrogen atoms in boron films during H 2 and He glow discharge and thermal desorption

Author： Tsuzuki K.   Natsir M.   Inoue N.   Sagara A.   Noda N.   Motojima O.   Hino T.   Fujita I.   Mochizuki T.   Yamashina T.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.47, Iss.6, 1996-06, pp. : 931-934

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