Control of discharge conditions to reduce hydrogen content in boron films coating

Author: Natsir M.   Tsuzuki K.   Sagara A.   Motojima O.   Tsuchiya B.   Hasegawa Y.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.47, Iss.6, 1996-06, pp. : 997-999

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Abstract