On the possibility of the in situ growth control and nondestructive depth profiling of ultrathin multilayer structures using keV hydrogen ions

Author： Kurnaev V.A. Trifonov N.N. Drozdov M.N. Salashchenko N.N.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.56, Iss.4, 2000-03, pp. : 253-255

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