Formation of 3D islands of metal oxides on silicon covered by native oxide film by multi-step ion sputtering of Ti, Nb and V

Author： Sushkova N.M. Akimov A.G.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.56, Iss.4, 2000-03, pp. : 287-291

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