Development of biased directional sputtering (BDS) for barrier metal formation

Author： Sato H.   Sato M.   Tagami M.   Funato K.   Sasaki M.   Taguchi S.   Mizuno S.   Kobayashi M.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.59, Iss.2, 2000-11, pp. : 437-444

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