An ultrahigh vacuum chemical vapor deposition system and its application to growth of nMOSFET and HBT structures

Author: Luo G.   Zhu P.   Chen P.   Liu Z.   Lin H.   Qian P.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.59, Iss.4, 2000-12, pp. : 927-931

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