Simulation of two-beam ion implantation in the multilayer and multicomponent targets

Author: Komarov A.F.   Komarov F.F.   Zukowski P.   Karwat C.   Kamarou A.A.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.63, Iss.4, 2001-08, pp. : 495-499

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Abstract