Author： Homyara H. Ahmad S. Ikezawa S. Baba K. Yoshioka T. Ninomiya Y. Nakamura K. Famakinwa T. Oda H. Yoshimura K. Taoda H. Fujii S. Hara T.
Publisher： Elsevier
ISSN： 0042-207X
Source： Vacuum, Vol.66, Iss.3, 2002-08, pp. : 203-207
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