RF hydrogen-plasma-induced defects in p-Si/SiO 2 structures with submicron thermally grown oxides

Author： Simeonov S.   Yourukov I.   Szekeres A.   Kafedjiiska E.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.69, Iss.1, 2002-12, pp. : 195-200

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