Ion beam assisted deposition of metal layers using a novel one beam system

Author： Komarov F.F.   Kamarou A.A.   Zukowski P.   Karwat C.   Sielanko J.   Kozak C.M.   Kiszczak K.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.70, Iss.2, 2003-03, pp. : 215-220

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