Influence of post-deposition annealing in oxygen ambient on metal-organic decomposed CeO 2 film spin coated on 4H-SiC

Author: Lim Way  

Publisher: Springer Publishing Company

ISSN: 0957-4522

Source: Journal of Materials Science: Materials in Electronics, Vol.23, Iss.1, 2012-01, pp. : 257-266

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Abstract