IR spectroscopic determination of the refractive index and thickness of hydrogenated silicon layers

Author： Timoshenkov S.   Pelipas V.   Simonov B.   Britkov O.   Kalugin V.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 0020-1685

Source： Inorganic Materials, Vol.47, Iss.6, 2011-06, pp. : 575-578

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