Structurally perfect silicon layers produced on sapphire by oxygen ion implantation

Author: Vorotyntsev V.   Shobolov E.   Gerasimov V.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 0020-1685

Source: Inorganic Materials, Vol.47, Iss.6, 2011-06, pp. : 571-574

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