![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
Author: Jian-Xi Y. Gao-Ling Z. Gao-Rong H.
Publisher: Elsevier
ISSN: 0167-9317
Source: Microelectronic Engineering, Vol.66, Iss.1, 2003-04, pp. : 115-120
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)