Author: Umezu I. Koizumi R. Mandai K. Aoki-Matsumoto T. Mizuno K. Inada M. Sugimura A. Sunaga Y. Ishii T. Nagasaki Y.
Publisher: Elsevier
ISSN: 0167-9317
Source: Microelectronic Engineering, Vol.66, Iss.1, 2003-04, pp. : 53-58
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