Author： Lu S.G. Yu Y.J. Mak C.L. Wong K.H. Zhang L.Y. Yao X.
Publisher： Elsevier
ISSN： 0167-9317
Source： Microelectronic Engineering, Vol.66, Iss.1, 2003-04, pp. : 171-179
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
By Azizian-Kalandaragh Yashar Aydemir Umut Altindal Şemsettin
Journal of Electronic Materials, Vol. 43, Iss. 4, 2014-04 ,pp. :
Access to resources
Recommend
