Characterization of (Ba,Sr)TiO 3 thin-film capacitors with Ir bottom electrodes and its improvement by plasma treatment

Author： Wuu D.-S. Horng R.-H. Lin C.-C. Liu Y.-H.

Publisher： Elsevier

ISSN： 0167-9317

Source： Microelectronic Engineering, Vol.66, Iss.1, 2003-04, pp. : 600-607

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