High quality silicon-based PZT thin films for memory applications

Author: Shao T.-Q.   Ren T.-L.   Wang X.-N.   Zhu J.   Liu L.-T.   Li Z.-J.  

Publisher: Elsevier

ISSN: 0167-9317

Source: Microelectronic Engineering, Vol.66, Iss.1, 2003-04, pp. : 713-718

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Abstract