Fabrication and properties of silicon-based PZT thin films for MFSFET applications

Author： Ren T.-L.   Shao T.-Q.   Zhang W.-Q.   Li C.-X.   Liu J.-S.   Liu L.-T.   Zhu J.   Li Z.-J.  

Publisher： Elsevier

ISSN： 0167-9317

Source： Microelectronic Engineering, Vol.66, Iss.1, 2003-04, pp. : 554-560

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