Microstructures of parylene-N thin films and the effect on copper diffusion

Author: Yang G.   Mathur D.   Wu X.   Dabral S.   Donald J.   Lu T.   Bakhru H.  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.25, Iss.11, 1996-11, pp. : 1778-1783

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Abstract