Gallium arsenide surface chemistry and surface damage in a chlorine high density plasma etch process

Author: Eddy C.   Glembocki O.   Leonhardt D.   Shamamian V.   Holm R.   Thoms B.   Butler J.   Pang S.  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.26, Iss.11, 1997-11, pp. : 1320-1325

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Abstract