Crystallographic texture of C54 titanium disilicide as a function of deep submicron structure geometry

Author： Svilan V.   Rodbell K.P.   Clevenger L.A.   Cabral C.   Roy R.A.   Lavoie C.   Jordan-Sweet J.   Harper J.  

Publisher： Springer Publishing Company

ISSN： 1543-186X

Source： Journal of Electronic Materials, Vol.26, Iss.9, 1997-09, pp. : 1090-1095

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

A Novel Application of C-AFM: Deep Sub-micron Single Probing for IC Failure Analysis

By Lee J.C.   Chuang J.H.  

Microelectronics Reliability, Vol. 43, Iss. 9, 2003-09 ,pp. : 1687-1692

Elsevier

Access to resources Recommend Favorite

Analytical modeling of thermal noise in deep submicron MOSFETs

By Lu Zhi-Qiang  

Analog Integrated Circuits and Signal Processing, Vol. 59, Iss. 2, 2009-05 ,pp. : 185-189

Springer Publishing Company

Access to resources Recommend Favorite

Hot-carrier effects on irradiated deep submicron NMOSFET

By Jiangwei Cui   Qiwen Zheng   Xuefeng Yu   Zhongchao Cong   Hang Zhou   Qi Guo   Lin Wen   Ying Wei   Diyuan Ren  

Journal of Semiconductors, Vol. 35, Iss. 7, 2014-07 ,pp. : 74004-74007

IOP Publishing

Access to resources Recommend Favorite

The STI stress effect on deep submicron PDSOI MOSFETs

By Jianhui Bu   Shuzhen Li   Jiajun Luo   Zhengsheng Han  

Journal of Semiconductors, Vol. 35, Iss. 3, 2014-03 ,pp. : 34008-34010

IOP Publishing

Access to resources Recommend Favorite

An evaluation of deep-submicron CMOS design optimized for operation at 77 K

By Foty Daniel  

Analog Integrated Circuits and Signal Processing, Vol. 49, Iss. 2, 2006-11 ,pp. : 97-105

Springer Publishing Company

Access to resources Recommend Favorite