The influence of rf induced bias on the properties of diamond-like carbon films prepared using ECR-CVD

Author: Yoon S.   Yang H.   Rusli   Ahn J.   Zhang Q.  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.27, Iss.1, 1998-12, pp. : 46-52

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Abstract