Plasma immersion ion implantation for SOI synthesis: SIMOX and ion-cut

Author: Lu Xiang   Iyer S.   Lee Jin   Doyle Brian   Fan Zhineng   Chu Paul   Hu Chenming   Cheung Nathan  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.27, Iss.9, 1998-09, pp. : 1059-1066

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Abstract