Compliant substrates: A comparative study of the relaxation mechanisms of strained films bonded to high and low viscosity oxides

Author： Hobart K. Kub F. Fatemi M. Twigg M. Thompson P. Kuan T. Inoki C.

Publisher： Springer Publishing Company

ISSN： 1543-186X

Source： Journal of Electronic Materials, Vol.29, Iss.7, 2000-07, pp. : 897-900

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