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Journal of Semiconductors, Vol. 36, Iss. 4, 2015-04 ,pp. : 44012-44016

IOP Publishing

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Compliant substrates: A comparative study of the relaxation mechanisms of strained films bonded to high and low viscosity oxides

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Piezoelectric and electrical properties of PZT-PSN thin film ceramics for MEMS applications

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MEMS SPDT microswitch with low actuation voltage for RF applications

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Microelectronics International, Vol. 32, Iss. 2, 2015-05 ,pp. : 55-62

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Design, test, integration and packaging of MEMS/MOEMS, 2005

By Courtois Bernard  

Analog Integrated Circuits and Signal Processing, Vol. 48, Iss. 1, 2006-08 ,pp. : 5-5

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