Low-dislocation relaxed SiGe grown on an effective compliant substrate

Author: Luo Y.   Liu J.   Jin G.   Wang K.   Moore C.   Goorsky M.   Chih C.   Tu K.  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.29, Iss.7, 2000-07, pp. : 950-955

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Abstract