Boron Diffusion into 6H-SiC through Graphite Mask

Author: Soloviev S.   Gao Y.   Wang X.   Sudarshan T.  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.30, Iss.3, 2001-03, pp. : 224-227

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Abstract