Author: Pakhomov G.L. Shashkin V.I. Pozdnyaev D.E. Muller C. Ribo J.-M.
Publisher: Elsevier
ISSN: 1566-1199
Source: Organic Electronics, Vol.3, Iss.3, 2002-12, pp. : 93-103
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Pinhole density measurements of barriers deposited on low-k films
By Shamiryan D. Abell T. Le Q.T. Maex K.
Microelectronic Engineering, Vol. 70, Iss. 2, 2003-11 ,pp. :