Low temperature nanocrystallization of silicon carbide by hydrogen reactive magnetron sputtering

Author: Kerdiles S.   Rizk R.  

Publisher: Taylor & Francis Ltd

ISSN: 0141-8610

Source: Philosophical Magazine. A. Physics of Condensed Matter. Defects and Mechanical Properties, Vol.82, Iss.3, 2002-02, pp. : 601-614

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Abstract