The influence of microwave plasma microtreatment at low adsorption on the nanomorphology of the surface of silicon (100) crystals

Author： Shanygin V. Yafarov R.

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7397

Source： Russian Microelectronics, Vol.42, Iss.5, 2013-09, pp. : 270-275

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