Micromachined Thermal Flow Sensors—A Review

By Kuo Jonathan T. W.   Yu Lawrence   Meng Ellis  

Micromachines, Vol. 3, Iss. 3, 2012-07 ,pp. : 550-573

MDPI

Access to resources Recommend Favorite

Micromachined high-g accelerometers: a review

By Narasimhan V   Li H   Jianmin M  

Journal of Micromechanics and Microengineering, Vol. 25, Iss. 3, 2015-03 ,pp. : 33001-33018

IOP Publishing

Access to resources Recommend Favorite

Characterization of Resonant Behavior and Sensitivity Using Micromachined PZT Cantilever

By Lee Jeong Hoon   Yoon Ki Hyun   Kim Tae Song  

Integrated Ferroelectrics, Vol. 50, Iss. 1, 2002-01 ,pp. : 43-52

Taylor & Francis Ltd

Access to resources Recommend Favorite

Characterization of the tuning performance of a micro-machined Fabry–Pérot interferometer for thermal infrared

By Tuohiniemi M   Näsilä A   Mäkynen J  

Journal of Micromechanics and Microengineering, Vol. 23, Iss. 7, 2013-07 ,pp. : 75011-75017

IOP Publishing

Access to resources Recommend Favorite

Effect of the Detector Width and Gas Pressure on the Frequency Response of a Micromachined Thermal Accelerometer

By Garraud Alexandra   Combette Philippe   Courteaud Johann   Giani Alain  

Micromachines, Vol. 2, Iss. 2, 2011-05 ,pp. : 167-178

MDPI

Access to resources Recommend Favorite