Study of the effect of substrate bias on the electrical properties of sputtered HfO 2 thin film deposited on silicon substrate

Author: Nahar R.K.   Sharma Aparna  

Publisher: Emerald Group Publishing Ltd

ISSN: 1356-5362

Source: Microelectronics International, Vol.24, Iss.1, 2007-01, pp. : 46-48

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Abstract