Single pole-piece objective lens with electrostatic bipotential lens for SEM

Author: Yonezawa A.   Maruo1 M.   Takeuchi1 T.   Morita1 S.   Noguchi1 A.   Takaoka1 O.   Sato1 M.   Wannberg2 B.  

Publisher: Oxford University Press

ISSN: 0022-0744

Source: Journal of Electron Microscopy, Vol.51, Iss.3, 2002-05, pp. : 149-156

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