Phonon Response in the Infrared Region to Thickness of Oxide Films Formed by Atomic Layer Deposition

Author： Scarel Giovanna Na Jeong-Seok Gong Bo Parsons Gregory N.

Publisher： Society for Applied Spectroscopy

ISSN： 0003-7028

Source： Applied Spectroscopy, Vol.64, Iss.1, 2010-01, pp. : 120-126

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