Mechanical properties and density of BCxNy films grown by low-pressure chemical vapor deposition from triethylamine borane

Author: Shayapov V.   Kosinova M.   Smirnov A.   Maksimovskii E.   Ayupov B.   Rumyantsev Yu.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 0020-1685

Source: Inorganic Materials, Vol.47, Iss.3, 2011-03, pp. : 262-266

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