Plasma-Assisted Diffusion Doping of Porous-Silicon Films

Author: Kovalevskii A. A.   Glukhmanchuk V. V.   Tarasikov M. V.   Sorokin V. M.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7397

Source: Russian Microelectronics, Vol.33, Iss.1, 2004-01, pp. : 13-17

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